Luminescence properties of $YVO_4:Eu^{3+}$ thin film phosphor deposited by RF magnetron sputter deposition technique

  • Kang, Jong-Hyuk (Dept. of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) ;
  • Han, Ji-Yeon (Dept. of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) ;
  • Jang, Ho-Seong (Dept. of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) ;
  • Yoo, Hyoung-Sun (Dept. of Materials Science and Engineering, Korea Advanced Institute of Science and Technology) ;
  • Yun, Sun-Jin (IT-Convergence and Component Laboratory, Electronics and Telecommunications Research Institute) ;
  • Jeon, Duk-Young (Dept. of Materials Science and Engineering, Korea Advanced Institute of Science and Technology)
  • Published : 2007.08.27

Abstract

$YVO_4:Eu^{3+}$ thin film phosphor samples have been deposited by using RF magnetron sputter deposition technique with various deposition temperatures. The Effect of deposition temperature (room temperature to $450\;^{\circ}C$) on morphological, crystal structure, and luminescence properties of $YVO_4:Eu^{3+}$ thin film phosphor has also been investigated. As the deposition temperature increases, the size of crystal grain and surface roughness of thin film increases principally and its crystallinity also increases. It is found that the asdeposited $YVO_4:Eu^{3+}$ thin film excited either photon or electron shows typical luminescence spectra successfully. CIE color coordinates of $YVO_4:Eu^{3+}$ thin film phosphor with increasing deposition temperature moved towards more reddish region.

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