한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
- /
- Pages.1165-1167
- /
- 2007
Threshold Voltage Control of a-Si TFT by Delta Doping of Phosphorous
- Soh, Hoe-Sup (School of Display Engineering, Hoseo University) ;
- Kim, Cheol-Se (Advanced Technology Development Department, LG Philips LCD) ;
- Kim, Eung-Do (Advanced Technology Development Department, LG Philips LCD)
- 발행 : 2007.08.27
초록
Delta doping method can separate the threshold voltage control region from the charge transport region in a-Si TFT, whereby the threshold voltage of a TFT could be modified. Threshold voltage could be changed by delta doping, while field effect mobility was estimated to be 80% of that of standard TFT.