한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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- Pages.1119-1120
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- 2007
Fabrication of 70nm-sized metal patterns on flexible PET Film using nanoimprint lithography
- Lee, Heon (Dept. Mater. Sci. & Eng, Korea Univ.) ;
- Lee, Jong-Hwa (Dept. Mater. Sci. & Eng, Korea Univ.)
- 발행 : 2007.08.27
초록
Nano-sized metal patterns were successfully fabricated on flexible PET substrate using nanoimprint lithography. 70nm line and space PMMA resist pattern was formed on PET substrate without residual layer by 'artial filling effect' and 20nm thin Cr metal layer was deposited by e-beam evaporation. Then, PMMA resist was selectively removed by acetone and 70nm narrow Cr pattern was formed.
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