한국광학회:학술대회논문집 (Proceedings of the Optical Society of Korea Conference)
- 한국광학회 2007년도 동계학술발표회 논문집
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- Pages.277-278
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- 2007
Optimum SIL System Design with High NA and Large Tolerance
- Won, Ki-Tak (School of Physics and Astronomy, Seoul National University) ;
- Choi, Na-Rak (School of Physics and Astronomy, Seoul National University) ;
- Kim, Jai-Soon (School of Physics and Astronomy, Seoul National University) ;
- Lee, Ji-Yeon (Digital Storage Research Lab., LG Electronics) ;
- Lee, Kyung-Eon (Digital Storage Research Lab., LG Electronics) ;
- Shin, Yun-Sup (Digital Storage Research Lab., LG Electronics)
- 발행 : 2007.02.01
초록
Even though high NA, Hyper SIL system easily decline the optical performance even a little alignment error. Not only to overcome this instability but to maintain the high NA gain, we suggest a new system (Optimum SIL) which is a combination of each advantage of Hyper SIL and Hemi SIL. Simulation results shows that Optimum SIL system has much higher tolerance to various performance-lowering factors than Hyper SIL system even with a relatively small NA resignation.
키워드