고주파 마그네트론 스퍼터링 방법으로 성막된 무기 혼합 $(SiO_2)_{1-x}(ZnO)_x$ 박막의 투습율 특성

Water Vapor Permeabilities of Inorganic Composite $(SiO_2)_{1-x}(ZnO)_x$ Films Prepared by RF-Magnetron Sputtering

  • Kim, Seung-Tae (Department of Electronics Enginnering, Catholic University of Daegu) ;
  • Yang, Ji-Yeon (Department of Electronics Enginnering, Catholic University of Daegu) ;
  • Kim, Deok-Su (Department of Electronics Enginnering, Catholic University of Daegu) ;
  • Ryu, Seong-Won (Department of Electronics Enginnering, Catholic University of Daegu) ;
  • Hong, Jae-Seok (Department of Electronics Enginnering, Catholic University of Daegu) ;
  • Lee, Byeong-Ro (Department of Electronics Enginnering, Catholic University of Daegu) ;
  • Park, Seung-Hwan (Department of Electronics Enginnering, Catholic University of Daegu) ;
  • Hong, U-Pyo (Department of Electronics Enginnering, Catholic University of Daegu) ;
  • Kim, Hwa-Min (Department of Electronics Enginnering, Catholic University of Daegu)
  • 발행 : 2007.02.01