한국광학회:학술대회논문집 (Proceedings of the Optical Society of Korea Conference)
- 한국광학회 2007년도 하계학술발표회 논문집
- /
- Pages.65-66
- /
- 2007
칼날 측정법을 이용한 베어 웨이퍼 검사 방법
Bare-ware inspection method using knife-edge optical test
- 발행 : 2007.07.01
초록
We present a new simple and fast bare-wafer inspection method. This method inspects the wafer front surface and inner structures simultaneously. The wafer surface is inspected using a knife-edge test in visible while the inner structure is inspected by a looking-through camera in infrared, at the same time and with a single white-light source. This paper presents a laboratory implementation of the test method with some experimental results.
키워드