Fabrication of Bit Patterned Media Using Multi-layer Soft Stamper Nanoimprint and Electro Deposition

  • Sohn, Jin-Seung (Semiconductor Device and Material Lab, Samsung Advanced Institute of Technology) ;
  • Lee, B.K. (Semiconductor Device and Material Lab, Samsung Advanced Institute of Technology) ;
  • Lee, D.H. (Semiconductor Device and Material Lab, Samsung Advanced Institute of Technology) ;
  • Cho, E.H. (Semiconductor Device and Material Lab, Samsung Advanced Institute of Technology) ;
  • Lee, M.B. (Semiconductor Device and Material Lab, Samsung Advanced Institute of Technology) ;
  • Kim, H.S. (Semiconductor Device and Material Lab, Samsung Advanced Institute of Technology) ;
  • Choa, S.H. (Semiconductor Device and Material Lab, Samsung Advanced Institute of Technology)
  • 발행 : 2007.05.28