한국자기학회:학술대회 개요집 (Proceedings of the Korean Magnestics Society Conference)
- 한국자기학회 2007년도 The 1st International Symposium on Advanced Magnetic Materials
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- Pages.24.2-24.2
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- 2007
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- 2233-9485(pISSN)
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- 2233-9574(eISSN)
Etch Characteristics of Magnetic Tunnel Junction Stack Using a High Density Plasma in a HBr/Ar Gas
- Min, Su-Ryun (Department of Chemical Engineering, INHA University) ;
- Choi, Han-Na (Department of Chemical Engineering, INHA University) ;
- Choi, Seung-Pil (Department of Chemical Engineering, INHA University) ;
- Kim, Jung-Seung (Nano-device Research Center, Korea Institute of Science and Technology) ;
- Shin, Kyung-Ho (Nano-device Research Center, Korea Institute of Science and Technology) ;
- Chung, Chee-Won (Department of Chemical Engineering, INHA University)
- 발행 : 2007.05.28