대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2007년도 춘계학술대회A
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- Pages.1617-1620
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- 2007
박막성형 기술 및 MEMS 공정을 이용한 자기변형 위치변환기
Fabrication of a Magnetostrictive Transpositioner using Thin Film Deposition and MEMS Techniques
- 발행 : 2007.05.30
초록
This paper presents a magnetostrictive transpositioner and its fabrication process. To get a transposition movement without shifting or twisting, it is designed as an array type. To fabricate the suggested design, micromachining and selective DC magnetron sputtering processes are combined. TbDyFe film is sputter-deposited on the back side of the bulk micromachined transpositioner, with the condition as: Ar gas pressure below
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