Design and Control of Mini-Scanning Electron Microscope

미니형 주사전자 현미경의 설계 및 제어

  • 박만진 (서울대학교 기계항공공학부) ;
  • 김동환 (서울산업대학교 기계설계자동화공학부) ;
  • 김영대 (서울산업대학교 나노생산기술연구소) ;
  • 장동영 (서울산업대학교 산업정보 시스템공학과) ;
  • 한동철 (서울대학교 기계항공공학부)
  • Published : 2007.05.30

Abstract

The most powerful analytical equipment usually comes at the cost of having the highest demand for space. Where electron microscopes has traditionally required a room to themselves, not just for reasons of their size but because of ancillary demands for pipes and service. The simple optical microscopes, of course, can occupy the desk-top, but because their performance is limited by the wavelength of light, their powers of magnification and resolution are inferior to that of the electron microscope. Mini SEM will sit comfortably on a desk-top but offers magnification and resolution performances much closer to that of a standard SEM. This new technique extends the scope of SEM as a high-resolution microscope, relatively cheap and widely available imaging tool, for a wider variety of samples.

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