Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2007.05a
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- Pages.1271-1276
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- 2007
Design and Control of Mini-Scanning Electron Microscope
미니형 주사전자 현미경의 설계 및 제어
Abstract
The most powerful analytical equipment usually comes at the cost of having the highest demand for space. Where electron microscopes has traditionally required a room to themselves, not just for reasons of their size but because of ancillary demands for pipes and service. The simple optical microscopes, of course, can occupy the desk-top, but because their performance is limited by the wavelength of light, their powers of magnification and resolution are inferior to that of the electron microscope. Mini SEM will sit comfortably on a desk-top but offers magnification and resolution performances much closer to that of a standard SEM. This new technique extends the scope of SEM as a high-resolution microscope, relatively cheap and widely available imaging tool, for a wider variety of samples.