대한기계학회:학술대회논문집 (Proceedings of the KSME Conference)
- 대한기계학회 2007년도 춘계학술대회A
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- Pages.210-214
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- 2007
펄스 플라즈마에 의한 나노입자 제조 시 하전이 입자의 포집에 미치는 영향
Effect of Charging on Particle Collection during Synthesis of Nanoparticles by Pulse Plasma
초록
Silicon nanoparticles are widely studied as a material with great potential for wide applications. For application to present industry, it should be easy to control the characteristics of nanoparticle including the size and structure. In this paper, we investigated the formation of Si nanoparticle using pulse plasma technology. Plasma technology is already quite common in device industry and the size of nanoparticle can be easily controlled according to plasma pulse duration. An inductively-coupled plasma chamber with RF power (13.56 MHz) was used with DC-biased grid