Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2007.05a
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- Pages.126-129
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- 2007
Formation of Silicon Particles Using $SiH_4$ pyrolysis at atmospheric pressure
상압에서 열분해법을 이용한 실리콘 입자 제조
Abstract
The particle formation using pyrolysis has many advantages over other particle manufacturing techniques. The particles by pyrolysis have relatively uniform size and chemical composition. Also, we can easily produce high purity particles. Thus, we studied the formation of silicon particles by pyrolysis of 50%