A study on a precision temperature control unit using thermoelectirc module

열전소자를 이용한 정밀 항온 유지 장치에 관한 실험 및 시뮬레이션 연구

During a process of a nanoimprint for manufacturing LCD, a small temperature variation on the LCD glass can cause thermal stress and generate unexpected displacement. To avoid this trouble, a precision temperature control unit using thermoelectric modules is appropriate for nanoimprint processes. The unit consists of an air control system, a cooling water control system, and a power control system. The air control system includes a thermoelectric module, thermocouples measuring temperatures of air and a duct-stale fin, and two air fans. The heat generated by the thermoelectric module is absorbed by the cooling water control system. The power control system catches the temperature of the thermoelectric module, and a PID controller with SCR controls the input power of the thermoelectric module. Temperature control performance is evaluated by experiment and simulation. The temperature control unit is able to control the exit temperature about ${\pm}2^{\circ}C$ from the incoming fluid temperature, and the error range is ${\pm}0.1^{\circ}C$. However, the control time is approximately 30minute, which needs further study of active control