Vertical Growth of Si Nanowires Via Control of Dilute Gas Ratio

  • Um, Han-Don (Dept. of Fine Chemical Engineering, Hanyang University) ;
  • Jung, Yang-Gyoo (Dept. of Fine Chemical Engineering, Hanyang University) ;
  • Jee, Sang-Won (Dept. of Fine Chemical Engineering, Hanyang University) ;
  • Seo, Hong-Seok (Dept. of Fine Chemical Engineering, Hanyang University) ;
  • Lee, Jung-Ho (Dept. of Fine Chemical Engineering, Hanyang University)
  • Published : 2007.05.10