한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 2007년도 춘계학술발표대회 및 제12회 신소재 심포지엄
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- Pages.24.1-24.1
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- 2007
Effect of Plasma Treatment to Surface of the Titanium Oxide Deposited by Plasma Enhanced Atomic Layer Deposition
- 발행 : 2007.05.10