Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)

2007.06a
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Pages.751-752
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2007
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2005-8446(pISSN)

Korean Society for Precision Engineering (한국정밀공학회)

권호 표지

Design of 12" Wafer Final Polishing System Structure

12인치 Wafer Final Polishing System 구조물 설계에 관한 연구

Park, J.K. (TiC Duckheung Co. LTD) ;
Ueda, T. (TiC Duckheung Co. LTD) ;
Lee, S.Y. (TiC Duckheung Co. LTD) ;
Shin, H.S. (TiC Duckheung Co. LTD)

Published : 2007.06.20

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