Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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A study on frequency response of two-mass system for gyroscope applications

각속도계 적용을 위한 이중 질량 시스템의 주파수 응답에 관한 연구

  • Hwang, Young-Suk (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Jung, Hyoung-Kyoon (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Song, Eun-Seok (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Baek, Chang-Wook (School of Electrical and Electronics Engineering, Chung-Ang University) ;
  • Kim, Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University)
  • 황영석 (서울대학교 공과대학 전기컴퓨터 공학부) ;
  • 정형균 (서울대학교 공과대학 전기컴퓨터 공학부) ;
  • 송은석 (서울대학교 공과대학 전기컴퓨터 공학부) ;
  • 백창욱 (중앙대학교 공과대학 전자전기 공학부) ;
  • 김용권 (서울대학교 공과대학 전기컴퓨터 공학부)
  • Published : 2007.11.02
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Abstract

This paper describes frequency response of two-mass system for gyroscope applications. The two-mass system of the proposed device is adapted to the sensing part of the gyroscope in this research. Two-mass system has two resonant peaks and wide flat region between two resonant peaks. The resonant frequency of driving part is in this flat region. Therefore, frequency tuning is not necessary for mode matching. In the proposed device, resonant frequency is designed as 7183 Hz in driving part. Mass ratio of two masses in sensing part is 0.1 and device size is 6 mm $\times$ 6 mm. The device is fabricated by SiOG process. The fabricated spring width is increased from $4{\mu}m$ to $4.5{\sim}4.7{\mu}m$, and the measured resonant frequency is 8392 Hz in driving mode. We operated the sensing part using parallel plate of proof mass to verify the sensing part. It is confirmed the device has a wide fiat region in frequency response curve and the resonant frequency of the driving part is in the wide flat region of sensing mode.

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