Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2007.11a
- /
- Pages.120-121
- /
- 2007
Characteristics of ZnO thin films depending on Rapid Thermal Annealing
Rapid Thermal Annealing 후열처리 조건에 따른 ZnO 박막의 특성
- Kim, Ji-Hong (Department of Electrical Engineering, Korea University) ;
- Cho, Dae-Hyung (Department of Electrical Engineering, Korea University) ;
- Koo, Sang-Mo (Department of Electrical Engineering, Korea University) ;
- Moon, Byung-Moo (Department of Electronic Materials Engineering, Kwangwoon University)
- Published : 2007.11.02
Abstract
In this paper, ZnO thin films were deposited by pulsed laser deposition (PLD) on
Keywords