Fabrication of two sided stator of traveling wave rotary USM

양면 Teeth구조를 가지는 진행파 회전형 초음파 모터의 고정자 설계 및 제작

A stator of ultrasonic motor of high torque with a new configuration is proposed. The stator designed newly is two sided vibrator consisting of toothed metal disk with piezoelectric ceramic ring bonded on both face of disk. which generates a flexural traveling wave along the circumference of disk. it produces a large vibrating force and amplitude because the vibrator is sandwiched by two piezoelectric ring. The finite element method was used to compute the vibration mode of the stator with a outer diameter of 48mm. A 6th vibration mode was chosen as operation mode with resonance frequency about 72kHz. According to the design, the prototype stator was fabricated and its performance was measured.