대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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- Pages.94-95
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- 2007
ZnO 기반의 투명 박막 트랜지스터 제작을 위한 Active-layer의 최적화에 대한 연구
Optimization of active layer for the fabrication of transparent thin film transistor based on ZnO
- 장성필 (한국과학기술연구원 에너지재료연구단) ;
- 이상규 (한국과학기술연구원 에너지재료연구단) ;
- 손창완 (한국과학기술연구원 에너지재료연구단) ;
- 임재현 (한국과학기술연구원 에너지재료연구단) ;
- 송용원 (한국과학기술연구원 에너지재료연구단) ;
- 주병권 (고려대학교 전자전기공학과) ;
- 이상렬 (한국과학기술연구원 에너지재료연구단)
- Chang, Seong-Pil (Center for Energy Materials Research, Korea Institute of Science and Technology) ;
- Lee, Sang-Gyu (Center for Energy Materials Research, Korea Institute of Science and Technology) ;
- Son, Chang-Wan (Center for Energy Materials Research, Korea Institute of Science and Technology) ;
- Leem, Jae-Hyeon (Center for Energy Materials Research, Korea Institute of Science and Technology) ;
- Song, Yong-Won (Center for Energy Materials Research, Korea Institute of Science and Technology) ;
- Ju, Byung-Kwon (Department of Electronics and Electrical Engineering, Korea University) ;
- Lee, Sang-Yeol (Center for Energy Materials Research, Korea Institute of Science and Technology)
- 발행 : 2007.11.02
초록
We have observed electrical properties of ZnO thin films for the fabrication of transparent thin film transistor. ZnO thin films were deposited on