Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2007.11a
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- Pages.94-95
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- 2007
Optimization of active layer for the fabrication of transparent thin film transistor based on ZnO
ZnO 기반의 투명 박막 트랜지스터 제작을 위한 Active-layer의 최적화에 대한 연구
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Chang, Seong-Pil
(Center for Energy Materials Research, Korea Institute of Science and Technology) ;
- Lee, Sang-Gyu (Center for Energy Materials Research, Korea Institute of Science and Technology) ;
- Son, Chang-Wan (Center for Energy Materials Research, Korea Institute of Science and Technology) ;
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Leem, Jae-Hyeon
(Center for Energy Materials Research, Korea Institute of Science and Technology) ;
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Song, Yong-Won
(Center for Energy Materials Research, Korea Institute of Science and Technology) ;
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Ju, Byung-Kwon
(Department of Electronics and Electrical Engineering, Korea University) ;
- Lee, Sang-Yeol (Center for Energy Materials Research, Korea Institute of Science and Technology)
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장성필
(한국과학기술연구원 에너지재료연구단) ;
- 이상규 (한국과학기술연구원 에너지재료연구단) ;
- 손창완 (한국과학기술연구원 에너지재료연구단) ;
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임재현
(한국과학기술연구원 에너지재료연구단) ;
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송용원
(한국과학기술연구원 에너지재료연구단) ;
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주병권
(고려대학교 전자전기공학과) ;
- 이상렬 (한국과학기술연구원 에너지재료연구단)
- Published : 2007.11.02
Abstract
We have observed electrical properties of ZnO thin films for the fabrication of transparent thin film transistor. ZnO thin films were deposited on