대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2007년도 심포지엄 논문집 정보 및 제어부문
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- Pages.393-394
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- 2007
통신기기용 ZnO 탄성표면파 필터의 제작에 관한 연구
A Study on Fabrication of ZnO Surface Acoustic Wave Filter for Communication Devices
초록
In this study, to minimize the above effect Zinc Oxide(ZnO) thin films on Si(100) substrate were deposited by RF magnetron sputter with changing sputtering conditions such as Ar/
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