A Study on Fabrication of ZnO Surface Acoustic Wave Filter for Communication Devices

통신기기용 ZnO 탄성표면파 필터의 제작에 관한 연구

  • 이동윤 (중부대학교 전기전자공학과)
  • Published : 2007.10.26

Abstract

In this study, to minimize the above effect Zinc Oxide(ZnO) thin films on Si(100) substrate were deposited by RF magnetron sputter with changing sputtering conditions such as Ar/$O_2$ gas ratios, RF power, substrate temperature, chamber prsssure and target-substrate distance. To analyze a crystallographic properties of the films, ${\Theta}/2{\Theta}$ mode X-ray diffraction, rocking curve and Alpha-step were performed. SAW filters were fabricated to evaluate the feasibility of ZnO thin film as a piezoelectrical materials and the processes of ZnO SAW filters using etch and lift-off were compared.

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