대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2007년도 심포지엄 논문집 정보 및 제어부문
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- Pages.271-272
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- 2007
WLS를 이용한 헤테로다인 레이저 간섭계에서의 비선형 오차 보정
Nonlinearity Error Compensation in Heterodyne Laser Interferometer using WLS Method
- Cha, Hyung-Seok (Sungkyunkwan University, School of Information and Communication Engineering) ;
- Lee, Woo-Ram (Sungkyunkwan University, School of Information and Communication Engineering) ;
- You, Kwan-Ho (Sungkyunkwan University, School of Information and Communication Engineering)
- 발행 : 2007.10.26
초록
In heterodyne laser interferometer, we use a phase difference between two beams to calculate target's length. However, there exist an nonlinearity error when measuring length in nanoscale. It is caused from frequency-mixed problem of two polarized beams, called cross talks. This fact limits the usefulness of an laser interferometer. To compensate the error, we propose a WLS(weighted least square) algorithm, which will reduce nonlinearity error and make a better optimization in heterodyne laser interferometer.
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