대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2007년도 심포지엄 논문집 정보 및 제어부문
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- Pages.251-252
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- 2007
나노조작기의 수평측 위치제어를 위한 Visual Servoing Loop 구성
Realization of Visual Servoing Loop for Position Control of a Nano Manipulator
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Choi, Jin-Ho
(Korea Research Institute of Standards and Science)
;
-
Park, Byong-Chon
(Korea Research Institute of Standards and Science)
;
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Ahn, Sang-Jung
(Korea Research Institute of Standards and Science)
;
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Kim, Dal-Hyun
(Korea Research Institute of Standards and Science)
;
-
Lyou, Joon
(Chungnam National University)
- 발행 : 2007.10.26
초록
Nano manipulator is used to manufacture Carbon NanoTube(CNT) tips. Using nano manipulator operator attaches a CNT at the end of Atomic Force Microscopy(AFM) tip, which requires a master mechanic and long manufacture time. Nano manipulator is installed inside Scanning Electron Microscopy (SEM) chamber to observe the operation. This paper presents a control of horizontal axis of nano manipulator via processing SEM image. Edges of AFM tip and CNT are first detected, the position information so obtained is fed to control horizontal axis of nano manipulator. To be specific, visual servoing loop was realized to control the axis more precisely.
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