Defect Inspection of TFT-LCD Panel using 3D Modeling and Periodic Comparison

3차원 모델링과 반복비교를 통한 TFT-LCD 패널의 결점 검출

  • Lee, Kyong-Min (Electrical and Computer Engineering Division, Pohang University of Science and Technology) ;
  • Chang, Moon-Soo (Electrical and Computer Engineering Division, Pohang University of Science and Technology) ;
  • Park, Poo-Gyeon (Electrical and Computer Engineering Division, Pohang University of Science and Technology)
  • 이경민 (포항공과대학교, 전자전기공학과) ;
  • 장문수 (포항공과대학교, 전자전기공학과) ;
  • 박부견 (포항공과대학교, 전자전기공학과)
  • Published : 2007.10.26

Abstract

In this paper, we propose a novel defects inspection algorithm for TFT-LCD panels. We first compensate the distorted image caused by the camera distortion and the uneven illumination environment using the least squares method and the bezier surface. We find a starting point of each pattern. The reference frame, made by subtract method using several clean patterns, is compared to each pattern to find defects. The simulation example shows that our algorithm not only inspects the defects well, but also is robust to the 1-pixel error.

Keywords