Selective Growth of Iron Oxide Thin Films Using Iron pentacarbonyl on Si(100) substrate

  • Lee, J.Y. (Department of Chemistry, Sungkyunkwan University) ;
  • Kang, B.C. (Department of Chemistry, Sungkyunkwan University) ;
  • Jung, D.Y. (Department of Chemistry, Sungkyunkwan University) ;
  • Boo, J.H. (Department of Chemistry, Sungkyunkwan University)
  • Published : 2007.02.06