Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Strong 380 nm ultraviolet photoluminescence from SiOx (x<2) film prepared by PECVD

  • Lee, Sol (Department of Nano Science and Technology, University of Seoul) ;
  • Park, Byoung-Youl (Department of Nano Science and Technology, University of Seoul) ;
  • Park, Kyoung-Wan (Department of Nano Science and Technology, University of Seoul) ;
  • Han, Moon-Sup (Department of Physics, University of Seoul)
  • Published : 2007.02.06
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