Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.02a
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- Pages.132-132
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- 2007
Direct Deposition of Polycrystalline Silicon Films on Plastic Substrates by Catalytic CVD for Thin Film Transistors
- Cho, Chul-Lae (Dept. of Electronics Engineering, Sejong University) ;
- Kim, Tae-Hwan (Dept. of Nano Science and Technology, University of Seoul) ;
- Lee, Kyung-Min (Dept. of Nano Science and Technology, University of Seoul) ;
- Hong, Wan-Shick (Dept. of Nano Science and Technology, University of Seoul)
- Published : 2007.02.06
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