Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.02a
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- Pages.131-131
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- 2007
Study on Application Tests of MEMS and Nano-devices using SiC Thin Films and Nano-wires Grown by MOCVD
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Nam, S.H.
(Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
;
- Hyun, J.S. (Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
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Boo, J.H.
(Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- Published : 2007.02.06
Abstract
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