Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2007.02a
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- Pages.124-124
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- 2007
Study on Synthesis and Analysis of Organic-Inorganic Hybrid polymer Thin films by PECVD for Low-k materials
- Cho, S.J. (Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Bae, L.S. (Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
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Boo, J.H.
(Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- Published : 2007.02.06
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