Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2007.11a
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- Pages.438-439
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- 2007
The investigation of ITO thin film prepared by Facing Targets Sputtering (FTS) by Bending
대향 타겟식 스퍼터링으로 증착한 ITO 박막의 Bending에 의한 특성 분석
- Kim, Sang-Mo (Kyungwon University) ;
-
Rim, You-Seung
(Kyungwon University)
;
- Keum, Min-Jong (Center for Advanced Plasma Surface Technology) ;
- Choi, Myung-Gyu (Kyungwon University) ;
- Kim, Kyung-Hwan (Kyungwon University)
- Published : 2007.11.01
Abstract
In this study, we prepared ITO thin film on the polycarbonate(PC) substrate by using Facing Targets sputtering (FTS) system. After the external bending force was applied to as-deposited ITO thin films with fixed face-plate distance (L), we investigated how properties of those change. As a result, the crack density of films was increasing as bending frequency increased. In accordance with crack distribution, we observed that the resistivity value of ITO thin film increased.