한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 추계학술대회 논문집
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- Pages.431-431
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- 2007
배향막으로 사용된 NDLC 박막의 증착방법에 따른 능력
Ability of Nitride-doped Diamond Like Carbon Thin Film as an Alignment Layer according to Deposition Methods
- Kim, Young-Hwan (Yonsei Univ.) ;
- Kim, Byoung-Yong (Yonsei Univ.) ;
- Oh, Byoung-Yun (Yonsei Univ.) ;
- Kang, Dong-Hun (Yonsei Univ.) ;
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Park, Hong-Gyu
(Yonsei Univ.) ;
- Lee, Kang-Min (Yonsei Univ.) ;
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Seo, Dae-Shik
(Yonsei Univ.)
- 발행 : 2007.11.01
초록
In this paper, the LC alignment characteristics of the NDLC thin film deposited by PECVD and sputtering were reported respectively. The NDLC thin film deposited using sputter showed uniform LC alignment at the 1200 eV of the ion beam intensity and pretilt angle was about