Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Characteristics of Indium Zinc Tin Oxide films grown by RF magnetron sputtering for organic light emitting diodes

RF magnetron sputtering system으로 성장시킨 OLED용 IZTO 박막의 특성연구

  • Park, Ho-Kyun (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Jeong, Soon-Wook (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) ;
  • Kim, Han-Ki (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology)
  • 박호균 (금오공과대학교, 정보나노소재공학) ;
  • 정순욱 (금오공과대학교, 정보나노소재공학) ;
  • 김한기 (금오공과대학교, 정보나노소재공학)
  • Published : 2007.11.01
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Abstract

We report on the electrical, optical, and structural properties of indium zinc tin oxide (IZTO) anode films grown at room temperature on glass substrate. The IZTO anode films grown by a RF magnetron sputtering were investigated as functions of RF power, working pressure, and process time in pure Ar ambient. To investigate electrical, optical and structural properties of IZTO anode films, 4-point probe, Hall measurement, UV/Vis spectrometer, Field Emission Scanning Electron Microscopy (FE-SEM), and X-ray diffraction (XRD) were performed, respectively. A sheet resistance of $13.88\;{\Omega}/{\square}$, average transmittance above 80 % in visible range were obtained from optimized IZTO anode films grown on glass substrate. These results shown the amorphous structure regardless of RF power and working pressure due to low substrate temperature.

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