한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 추계학술대회 논문집
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- Pages.321-322
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- 2007
박막태양전지 하부전극용 Mo 박막특성 연구
A Study on properties of Lower Electrode thin films solar cell for Mo thin film
- Yang, Hyeon-Hun (Mokpo national Univ.) ;
- Kim, Young-Jun (Mokpo national Univ.) ;
- Jeong, Woon-Jo (Mokpo national Univ.) ;
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Park, Gye-Choon
(Mokpo national Univ.)
- 발행 : 2007.11.01
초록
In order to increase the cost effectiveness of solar cells, module production should be treated more comprehensively. Back contact cells offer distinct advantage in the interconnection of cells to modules. Thereby Mo thin film were prepared in order to clarify optimum conditions for growth of the thin film depending upon process, and then by changing a number of deposition conditions and substrate temperature conditions variously, structural and electrical characteristics were measured. For the manufacture of the Mo were vapor-deposited in the named order. Among them, Mo were vapor-deposited by using the sputtering method in consideration of their adhesive force to the substrate, and the DC power was controlled so that the composition of Mo, while the surface temperature having an effect on the quality of the thin film was changed from R.T