한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 추계학술대회 논문집
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- Pages.317-318
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- 2007
PLD를 이용한 IZO 투명전극의 결정구조에 영향을 미치는 공정인자에 대한 연구
The Effects of the Processing Parameters on the Structure of IZO Transparent Thin Films Deposited by PLD Process
- Kim, Pan-Young (Department of Materials Engineering, Yeungnam University) ;
- Lee, Jai-Yeoul (Department of Materials Engineering, Yeungnam University)
- 발행 : 2007.11.01
초록
In this study, transparent conducting oxide indium zinc oxide (IZO) thin films were deposited by pulsed laser deposition (PLD) Process as a function of the deposition time on the glass substrates at