한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2007년도 추계학술대회 논문집
- /
- Pages.9-10
- /
- 2007
Hf metal layer의 두께에 따른 $HfO_2$ /Hf/Si MOS 커패시터의 전기적 특성
Electrical Characterization of $HfO_2$ /Hf/Si MOS Capacitor with Thickness of Hf Metal Layer
- Bae, Kun-Ho (Kyungpook National Univ.) ;
- Do, Seung-Woo (Kyungpook National Univ.) ;
- Lee, Jae-Sung (Uiduk Univ.) ;
-
Lee, Yong-Hyun
(Kyungpook National Univ.)
- 발행 : 2007.11.01
초록
In this paper, Thin films of