한국정보과학회:학술대회논문집 (Proceedings of the Korean Information Science Society Conference)
- 한국정보과학회 2007년도 가을 학술발표논문집 Vol.34 No.2 (C)
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- Pages.367-370
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- 2007
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- 1598-5164(pISSN)
퍼지 시스템과 Particle Swarm Optimization(PSO)을 이용한 Prewarping 기술
Prewarping Techniques Using Fuzzy system and Particle Swarm Optimization
- Jang, Woo-Seok (Myongji Univ. Department of Information Engineering) ;
- Kang, Hwan-Il (Myongji Univ. Department of Information Engineering) ;
- Lee, Byung-Hee (Myongji Univ. Department of Information Engineering)
- 발행 : 2007.10.26
초록
In this paper, we concentrate on the mask design problem for optical micro-lithography. The pre-distorted mask is obtained by minimizing the error between the designed output image and the projected output image. We use the particle swarm optimization(PSO) and fuzzy system to insure that the resulting images are identical to the desired image. Our method has good performance for the iteration number by an experiment.
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