Power Line Communication을 이용한 반도체 Plasma 장비 전력시스템 원격제어

The Electric Power System Remote Control Of Semiconductor Plasma Manufacturing Equipment Using Power Line Communication

This paper is the electric power system remote control of semiconductor plasma manufacturing equipment using PLC(power line communication). PLC is useful for economical data link but various problems and limitations are caused in using power lines for communications channel Develop of Semiconductor plasma manufactur ing equipment and remote automation technologies of tool develops day after day and standards. Also, Remote electric power control and device module control by GUIRCS(Graphic User Interface Remote Control System) of tool are monitoring in real time.