대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2007년도 제38회 하계학술대회
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- Pages.1572-1573
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- 2007
RF Magnetron Sputter Chamber 내부의 압력 조절 제어 시스템
Pressure Control System of RF Magnetron Sputter Chamber
- Lee, S.J. (Department of Electrical Engineering, Chungnam National University) ;
- Lee, H.H. (Department of Electrical Engineering, Chungnam National University) ;
- Lee, H.H. (Department of Electrical Engineering, Chungnam National University) ;
- Kim, Y.J. (Department of Electrical Engineering, Chungnam National University)
- 발행 : 2007.07.18