Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2007.07a
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- Pages.1528-1529
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- 2007
Fabrication of a thermoelectron emitter for a micro mass spectrometer
초소형 질량 분석기를 위한 열전자 방출원 제작
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Song, S.H.
(Division of Electrical & Computer Engineering, AJOU University)
;
- Yoon, H.J. (Division of Electrical & Computer Engineering, AJOU University) ;
- Hong, Nguyen Tuan (Department of Physics, AJOU University) ;
- Lee, S.I. (Department of Physics, AJOU University) ;
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Yang, S.S.
(Division of Electrical & Computer Engineering, AJOU University)
- Published : 2007.07.18
Abstract
In this paper, we present the fabrication of a thermoelectron emitter for a micro mass spectrometer. The micro mass spectrometer consists of a silicon substrate with a thermoelecton emitter and glass substrate with an acceleration electrode and a repeller electrode. The hot-filament is fabricated by electroplating. We designed two shapes of thermoelectron emitter and compared the emission current.
Keywords