산소 분위기압의 변화에 따른 Al:ZnO 박막의 특성

Characterization of Al:ZnO thin films deposited at different oxygen pressure

Epitaxial thin films of aluminum-doped zinc oxide (AZO) have been deposited on commercial corning glass using an Nd:YAG pulsed laser deposition technology. The structural, electrical and optical properties of these films were investigated as a function of oxygen pressure. The experimental results show that the electrical resistivity of films deposited at 5 mTorr with substrate temperature of $300^{\circ}C$ were $4.633{\times}10^{-4}$. The average transmission of AZO thin films in the visible range were over 90%.