Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Effects of TiN bufer on field emission properties of conical-type tungsten tips with carbon nanotubes coated

원뿔형 CNT-W 팁의 TiN 완충막 유무에 따른 전계방출 특성

  • Kim, Young-Kwang (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
  • Yun, Sung-Jun (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
  • Kim, Won (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
  • Kim, Jong-Pil (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
  • Park, Chang-Kyun (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University) ;
  • Park, Jin-Seok (Dept. of Electronic, Electrical, Control and Instrumentation Engineering, Hanyang University)
  • 김영광 (한양대학교 전자전기제어계측공학과) ;
  • 윤성준 (한양대학교 전자전기제어계측공학과) ;
  • 김원 (한양대학교 전자전기제어계측공학과) ;
  • 김종필 (한양대학교 전자전기제어계측공학과) ;
  • 박창균 (한양대학교 전자전기제어계측공학과) ;
  • 박진석 (한양대학교 전자전기제어계측공학과)
  • Published : 2007.07.18
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Abstract

Experimental results regarding to the structural properties of carbon nanotubes (CNTs) and the field-emission characteristics of CNT-coated tungsten (W) tips are presented. CNTs are successfully grown on conical-type W-tips by inductively coupled plasma-chemical vapor deposition (ICP-CVD) with or without inserting a TiN-buffer layer prior to the formation of Ni catalysts. For all the CNTs grown, their nanostructures, morphologies, and crystalline structures are analyzed by FESEM, HRTEM, and Raman spectroscopy. Furthermore, the emission properties of CNT-based field-emitters are characterized to estimate the maximum current density and the threshold voltage. The results obtained in this study indicate that the emission current level of the CNT-emitter without using a TiN buffer is desirable for the application of micro-focused x-ray systems.

Keywords