Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 2006.06a
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- Pages.845-846
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- 2006
Feedback control for initially unengaged vertical comb type electrostatic scanner
초기 비결합된 수직빗살 전극형 정전 스캐너의 거동제어
- Lee, Byeung-Leul (Microsystems Laboratory Samsung Advanced Institute of Technology) ;
- Won, Jongw-Ha (Microsystems Laboratory Samsung Advanced Institute of Technology) ;
- Cho, Jin-Woo (Microsystems Laboratory Samsung Advanced Institute of Technology) ;
- Jeong, Hee-Mun (Microsystems Laboratory Samsung Advanced Institute of Technology) ;
- Cho, Yong-Chol (Microsystems Laboratory Samsung Advanced Institute of Technology) ;
- Lee, Jin-Ho (Microsystems Laboratory Samsung Advanced Institute of Technology) ;
- Go, Young-Chol (Microsystems Laboratory Samsung Advanced Institute of Technology)
- 이병렬 (삼성 종합 기술원 마이크로 시스템 연구실) ;
- 원종화 (삼성 종합 기술원 마이크로 시스템 연구실) ;
- 조진우 (삼성 종합 기술원 마이크로 시스템 연구실) ;
- 정희문 (삼성 종합 기술원 마이크로 시스템 연구실) ;
- 조용철 (삼성 종합 기술원 마이크로 시스템 연구실) ;
- 이진호 (삼성 종합 기술원 마이크로 시스템 연구실) ;
- 고영철 (삼성 종합 기술원 마이크로 시스템 연구실)
- Published : 2006.06.21
Abstract
In this paper, we describe a capacitive position sensing and motion control scheme of a MEMS scanner used for laser display application. The laser displays can be made by scanning laser beams much the same way a CRT scans electron beams. So the accuracy of the scanner motion determines the quality of the displayed image. The MEMS scanner under consideration is composed of electrostatic comb electrodes with initial gap and requires large driving voltage. Due to the under-damping and nonlinear driving characteristics, the scanner motion is subject to be an unwanted oscillation. For the linear scanner motion, we devise a differential charge amplifier and phase compensator. The experimental results show that the implemented feedback control system provides sufficient electrical damping and improves the dynamic performance of the scanner.
Keywords