대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2006년도 하계종합학술대회
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- Pages.645-646
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- 2006
AFM용 수정진동자 진동폭의 직접 측정 기술
Direct measurement technique of the oscillation amplitude of a quartz tuning fork in atomic force microscopy
- Kim, Jeong-Hoi (Department of Electronics and Electrical Engineering Pohang University of Science and Technology) ;
- Han, Hae-Wook (Department of Electronics and Electrical Engineering Pohang University of Science and Technology)
- 발행 : 2006.06.21
초록
The oscillation amplitude of a probe tip is an important parameter to determine the resolution of atomic force microscopy (AFM) techniques. In this work, we introduce a new method for the measurement of the oscillation amplitude of a quartz tuning fork tip sub-nanometer resolution.
키워드