대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)

대한전자공학회 (The Institute of Electronics and Information Engineers)
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마이크로 공진기 어레이 제작을 위한 홀로그래픽 나노노광 기술

Holographic nanolithography technique for the fabrication of micro-cavity arrays

  • 김정회 (포항공과대학교 전자전기공학과) ;
  • 김창수 (포항공과대학교 전자전기공학과) ;
  • 한해욱 (포항공과대학교 전자전기공학과)
  • Kim, Jeong-Hoi (Department of Electronics and Electrical Engineering Pohang University of Science and Technology) ;
  • Kim, Chang-Su (Department of Electronics and Electrical Engineering Pohang University of Science and Technology) ;
  • Han, Han-Wook (Department of Electronics and Electrical Engineering Pohang University of Science and Technology)
  • 발행 : 2006.06.21
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초록

Two-dimensional (2D) photonic quasicrystals (PQCs) were fabricated by a holographic nanolithography techniques. Using two laser beams with different angles incident on the sample, micro-cavities with 2D internal nanostructures are patterned with a few micrometer periods.

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