대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)

대한전자공학회 (The Institute of Electronics and Information Engineers)
권호 표지

프라즈마 디스플레이 패널의 고효율화를 위한 MgO 증착 조건의 최적화 및 PDP 방전특성 분석

Optimization of MgO Evaporation for PDP Efficiency and Discharging Characterization

  • 권상직 (경원대학교 전자공학과) ;
  • 김용재 (경원대학교 전자공학과) ;
  • 이조휘 (경원대학교 전자공학과) ;
  • 김광호 (경원대학교 전자공학과) ;
  • 양순석 (경원대학교 전자공학과)
  • Kwon, Sang-Jik (Department of Electronics Engineering Kyungwon University) ;
  • Kim, Yong-Jae (Department of Electronics Engineering Kyungwon University) ;
  • Li, Zhao-Hui (Department of Electronics Engineering Kyungwon University) ;
  • Kim, Kwang-Ho (Department of Electronics Engineering Kyungwon University) ;
  • Yang, Soon-Seuk (Department of Electronics Engineering Kyungwon University)
  • 발행 : 2006.06.21
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초록

Effects of the evaporation rate of MgO films using electron beam were investigated on the MgO properties and the discharge characteristics of the plasma display panel (PDP). The evaporation rate was changed from $3{\AA}$/sec to $15{\AA}$/sec at a substrate temperature of $300^{\circ}C$. MgO properties such as crystal orientation, surface roughness, contact angle, and film structure were inspected using XPS, AFM, drop shape analysis and SEM. We also studied the relation between MgO properties and PDP discharging characteristics. The minimum firing voltage and maximum efficacy were obtained at evaporation rate of $5{\AA}$/sec. In the MgO film deposited at $5{\AA}$/sec, (200) orientation was most intensive and surface roughness was minimum.

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