대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2006년도 하계종합학술대회
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- Pages.541-542
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- 2006
초소형 전자빔 array에 적용 가능한 탄소 나노튜브 전자방출원 제작
Carbon nanotubes field emission tip for micro sized E-beam array system
- 엄보세 (서울대학교 전기공학부) ;
- 한창호 (서울대학교 전기공학부) ;
- 전국진 (서울대학교 전기공학부) ;
- 염민형 (성균관대학교 물리학과) ;
- 양지훈 (성균관대학교 물리학과) ;
- 박종윤 (성균관대학교 물리학과)
- Eom, Bo-Se (Seoul National University) ;
- Han, Chang-Ho (Seoul National University) ;
- Chun, Kuk-Jin (Seoul National University) ;
- Yum, Min-Hyung (Sungkyunkwan University) ;
- Yang, Ji-Hun (Sungkyunkwan University) ;
- Park, Chong-Yun (Sungkyunkwan University)
- 발행 : 2006.06.21
초록
In this paper, I propose the field emission tip for the E-beam array system that is made by carbon nanotubes(CNT). CNT is one of the most expected future materials, because of its great mechanical, chemical and electrical characteristics. So CNT can be used for many applications such as electron emitter, sensor, single electron transistor and AFM tip. And CNT will be applied to our E-beam array system as field emission tip so we will improve the system's electrical characteristics.
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