대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2006년도 하계종합학술대회
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- Pages.515-516
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- 2006
나노미터 분해능을 갖는 테라헤르츠 근접장 현미경
THz near-field microsope with nanameter resolution
- 박홍규 (포항공과대학교 나노테라 포토닉스 연구실) ;
- 김정회 (포항공과대학교 나노테라 포토닉스 연구실) ;
- 이경인 (포항공과대학교 나노테라 포토닉스 연구실) ;
- 한해욱 (포항공과대학교 나노테라 포토닉스 연구실)
- Park, Hong-Kyu (NanoTeraHz Photonics Lab Pohang University of Technology and Science) ;
- Kim, Jeong-Hoi (NanoTeraHz Photonics Lab Pohang University of Technology and Science) ;
- Lee, Kyung-In (NanoTeraHz Photonics Lab Pohang University of Technology and Science) ;
- Han, Hae-Wook (NanoTeraHz Photonics Lab Pohang University of Technology and Science)
- 발행 : 2006.06.21
초록
A THz near-field microscope(THz NFM) is developed by a combination of THz time-domain spectroscopy and AFM(Atomic Force Microscopy). We have observed 80nm lateral resolution, demonstrating that the THz NFM technique has a great potential as a important probing tool for the analysis of the biological and semiconductor nanostructures.
키워드