대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2006년도 하계종합학술대회
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- Pages.473-474
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- 2006
Analysis of Physical Characteristics on Compound Semiconductor $B_{13}P_2$ using APCVD
- Hong, K.K. (Dept. of Electrical and Computer Eng., University of Seoul) ;
- Jung, Y.C. (Dept. of Electrical and Computer Eng., University of Seoul) ;
- Kim, C.J. (Dept. of Electrical and Computer Eng., University of Seoul)
- 발행 : 2006.06.21
초록
Boron Phosphide films were deposited on (111) Si substrate at
키워드